Epitaxial Pb(Zr, Ti)O3 thin films for a MEMS application

Tóm tắt

This research presents the deposition and device fabrication of epitaxial Pb(Zr, Ti)O3 (PZT) thin films for applications in microelectromechanical systems (MEMS). A piezoelectric micro-membrane is described as an example. Using the pulsed laser deposition (PLD) technique and the MEMS microfabrication process, the piezo-membranes with diameters ranging from 200 to 500µm were obtained. The displacement of piezo-membranes increased from 5.1 to 17.5 nm V−1 with a piezoelectric-membrane diameter in the range of 200–500µm. Furthermore, the effect of PZT film-thickness on the mechanical properties has been investigated. By using the conductive-oxide SrRuO3 (SRO) layers as the electrodes, the degradation of both ferroelectric and piezoelectric properties is prevented up to 1010 switching cycles.

Từ khoá

Keywords: epitaxial thin films, Pb(Zr, Ti)O3, piezo MEMS devices, conductive-oxide electrodes

Tài liệu tham khảo

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