Epitaxial Pb(Zr, Ti)O3 thin films for a MEMS application

    Minh D Nguyen 1
    Hung N Vu 2
    Dave H A Blank 3
    Guus Rijnders 3

    Advances in Natural Sciences: Nanoscience and Nanotechnology - Vol. 2, No. 1 (2011)

    1. SolMateS B.V., Drienerlolaan 5, Building Hogekamp, 7522 NB Enschede, The Netherlands
    2. International Training Institute for Materials Science, Hanoi University of Technology, 1 Dai Co Viet Road, Hanoi, Vietnam
    3. Inorganic Materials Science, MESA Institute for Nanotechnology, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands

    Tiếng Anh

    Tóm tắt

    This research presents the deposition and device fabrication of epitaxial Pb(Zr, Ti)O3 (PZT) thin films for applications in microelectromechanical systems (MEMS). A piezoelectric micro-membrane is described as an example. Using the pulsed laser deposition (PLD) technique and the MEMS microfabrication process, the piezo-membranes with diameters ranging from 200 to 500µm were obtained. The displacement of piezo-membranes increased from 5.1 to 17.5 nm V−1 with a piezoelectric-membrane diameter in the range of 200–500µm. Furthermore, the effect of PZT film-thickness on the mechanical properties has been investigated. By using the conductive-oxide SrRuO3 (SRO) layers as the electrodes, the degradation of both ferroelectric and piezoelectric properties is prevented up to 1010 switching cycles.

    Từ khoá

    Keywords: epitaxial thin films, Pb(Zr, Ti)O3, piezo MEMS devices, conductive-oxide electrodes

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