Fabrication of micro accelerometer and magnetoresistive sensor directly on a ceramic substrate

Tóm tắt

Micro-electro-mechanical systems (MEMS) sensors have movable parts: thus, it is difficult to handle them at fabrication because of the possibility of fracture. If a MEMS sensor could be fabricated not only on a silicon substrate but also on a ceramic substrate, which can be used for a package of the end product, the above-mentioned problem about handling would be solved, and its fabrication cost would be reduced. In this presentation, as demonstrations of the sensors directly fabricated on a ceramic package, an accelerometer and a magnetoresistive (MR) sensor are focused on. A micro accelerometer is proposed, which consists of a proof mass and ferroelectric substrate under it. A screen-printed barium titanate (BTO) film on an alumina substrate was employed as ferroelectrics. The sensitivity of the fabricated accelerometer was 0.1 pF g −1 . A triaxis MR sensor is proposed, which detects not only x- and y-axes’ magnetic field intensities but also that of the z-axis. Namely, not only azimuth but also angle of elevation of the sensor can be detected from triaxis components of the geomagnetic field. A permalloy (FeNi) plate is stood aside from the MR element. The plate distorts magnetic field and generates the x- (or y-) component from the originally z-directional field. A triaxis geomagnetic field was successfully detected by the fabricated sensor.

Từ khoá

Keywords: ceramic substrate, accelerometer, magnetoresistive (MR) sensor

Tài liệu tham khảo

[1] Aoyagi S and Isono Y 2007 High-sensitivity surface micromachinable accelerometer using a ferroelectric substrate and its characterization, IEEJ Trans. Electr. Electron. Eng. 2 318–27

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[3] Lenz J E 1990 A review of magnetic sensors Proc. IEEE 78 973–89

[4] Shimoe O, Abe Y, Shonowaki Y and Hashizume S 2002 Magnetic compass using magneto-resistive device Hitachi Met. Tech. Rev. 18 37–42

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